◆Controller: XM-1500
◆Head: XM-C1000
◆Head base monitor section: XM-M1200
◆Head base movable stage part: XM-S1200
◆Camera probe stage marker: XM-T1200
◆Image sensor: 4 million pixels CMOS
◆Measurement range: 600×300×200(mm)
◆Minimum display unit: 1㎛
◆Repeatability When stage is locked: ±3㎛
◆Repeatability When stage is unlocked: ±4㎛
◆Indication error When stage is locked: ±8㎛
◆Indication error When stage is unlocked: ±(10 L/100)㎛
◆Load capacity: 25kg
◆X-axis movable range: ±100mm
◆Rotation range: ±60°
◆Number of probes: 2

✤If there is a discrepancy between the specifications and the actual product, priority will be given to the actual product.