Specifications and Inspection Results (Standards)
◆Travel Range: X 152, Y 152mm (X 150, Y 150mm)
◆Maximum Speed: X 30, Y 30mm/s (X 30, Y 30mm/s)
◆Motor Feed Accuracy: X 0.3μm, -2.5μm (±7μm)
Y 0.1μm, -1.7μm (±7μm)
◆Motor Feed Reproducibility: X 1.7μm p-v (6μm p-v)
Y 1.7μm p-v (6μm p-v)
◆Correction Value: X 0.10000767, Y 0.10000193
◆Platform flatness: 6μm (50μm/movable range)
◆XY axis orthogonality: 2.0" (60")
◆Z axis orthogonality: X 15" (30"), Y 3" (30")
◆Scale error: X 0.2μm, -0.3μm (±2.6μm/movable range)
　　　　　　　　Y 0.4μm, -0.2μm (±2.6μm/movable range)
◆Scale repeatability: X 0.2μm p-v (3μm p-v)
　　　　　　　　　Y 0.1μm p-v (3μm p-v)
◆Correction value: X 0.10000447, Y 0.10000193

✤In case of discrepancies between specifications and the actual product, the actual product will take precedence.