◆ Measurement range ZX: 12mm/50mm arm, 24mm/100mm arm x 200
◆ Accuracy Z-axis indication accuracy (vertical direction): ±(0.3 2H/100)μm (H: measurement height mm)
◆ Measurement resolution: 50nm/50mm arm, 10nm/100mm arm
◆ Accuracy X-axis indication accuracy (horizontal direction): ±(0.5 L/200)μm (L: measurement length mm)
◆ Sampling interval: 0.05 to 20μm
◆ Straightness accuracy: (0.05 1.5L/1000)μm
◆ Sensing method Z-axis (vertical direction): Highly stable double-path laser interferometer
◆ Sensing method X-axis (horizontal direction): Optical diffraction scale

✤ If there is a difference between the specifications and the actual product, the actual product will take precedence.