Model Controller XM-1500
Head XM-C1000
Head base monitor section XM-M1200
Head base movable stage section XM-S1200
Camera Probe Stage Marker XM-T1200

Image sensor 4 million pixels CMOS
Measurement range 600×300×200(mm)
Minimum display unit 1㎛
Measurement accuracy　Repeatability　When stage is locked　　　　　　　　　　±3㎛
　　　　　　Repeatability　When stage is unlocked　±4㎛
Indication error When stage is locked ±8㎛
Indication error When stage is unlocked ± (10 L/100)㎛
Stage section load capacity 25kg
　　　　　　　X-axis movable range　±100mm
Rotation range ±60°
Number of probes 2

✤If there is a discrepancy between the specifications and the actual product, priority will be given to the actual product.