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◆Measuring range: 900×1000×600mm
◆Minimum display amount: 0.0001 mm (0.1 μm)
◆Measurement accuracy (temperature environment 1)
　When using TP200: Length measurement error E0.MPE=1.9 3L/1000 μm
　E150.MPE=2.4 3L/1000 μm
　Repeatability R0.MPL=1.9 μm
　Single stylus shape error PFTU.MPE=1.9 μm
◆Drive speed: 519mm/s, measurement speed: 8mm/s
◆Drive acceleration: 2309mm/s^2
◆Real-time temperature compensation function standard equipment
◆ Joystick J/S-BOX M Type A
　(With front, rear, left and right direction change function)

◆Data processing device MCOSMOS-2 V4.1
◆PH10 MQP R system (S) Domestic
◆TP200 set
　TP200 probe
　Stylus module (standard)
　Stylus φ4 L10 mm
　Stylus φ6 L10 mm
　Stylus φ4 L20 mm
　Extension 40mm (carbon)
　Extension 50mm (carbon)
◆Standard MB φ20 B (with Japanese documents)
◆Air dryer set AC100V specification
◆Micro mist separator set